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Method for Forming Projections and Depressions, Se

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专利名称:Method for Forming Projections and

Depressions, Sealing Structure, and Light-Emitting Device

发明人:Yusuke Nishido申请号:US15211444申请日:20160715

公开号:US20160322608A1公开日:20161103

专利附图:

摘要:A novel method for forming projections and depressions is provided. A novelsealing structure is provided. A novel light-emitting device is provided. A first step of

forming a film containing at least two kinds of metals having different etching rates overa surface; a second step of heating the film so that the metal having a lower etching ratesegregates; a third step of selectively etching the metal having a higher etching rate; anda fourth step of selectively etching the surface using a residue containing the metalhaving a lower etching rate are included.

申请人:Semiconductor Energy Laboratory Co., Ltd.

地址:Kanagawa-ken JP

国籍:JP

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