专利名称:Method for Forming Projections and
Depressions, Sealing Structure, and Light-Emitting Device
发明人:Yusuke Nishido申请号:US15211444申请日:20160715
公开号:US20160322608A1公开日:20161103
专利附图:
摘要:A novel method for forming projections and depressions is provided. A novelsealing structure is provided. A novel light-emitting device is provided. A first step of
forming a film containing at least two kinds of metals having different etching rates overa surface; a second step of heating the film so that the metal having a lower etching ratesegregates; a third step of selectively etching the metal having a higher etching rate; anda fourth step of selectively etching the surface using a residue containing the metalhaving a lower etching rate are included.
申请人:Semiconductor Energy Laboratory Co., Ltd.
地址:Kanagawa-ken JP
国籍:JP
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