MICROMECHANICAL STRUCTURE

专利名称：MICROMECHANICAL STRUCTURE发明人：Dietrich Schubert,Wolfgang Fuerst,Stefan

Liebing,Stefan Rurlaender

申请号：US13259392申请日：20100120

公开号：US20120073370A1公开日：20120329

专利附图：

摘要：A micromechanical structure, in particular an acceleration sensor, is described,having a substrate, a seismic mass, which is movable relative to the substrate, and at leastone anchoring element, which is fixedly connected to the substrate, the seismic mass

being attached to the substrate by the anchoring element, and at least one springelement being situated between the seismic mass and the anchoring element, andfurthermore, the anchoring element has at least one stop element for interaction with atleast one counterstop element of the seismic mass.

申请人：Dietrich Schubert,Wolfgang Fuerst,Stefan Liebing,Stefan Rurlaender

地址：Reutlingen DE,Reutlingen DE,Kiebingen DE,Reutlingen DE

国籍：DE,DE,DE,DE

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