Inline dispense capacitor

专利名称：Inline dispense capacitor

发明人：Anton deVilliers,Ronald Nasman,James

Grootegoed,Norman A. Jacobson, Jr.

申请号：US14600821申请日：20150120公开号：US09718082B2公开日：20170801

专利附图：

摘要：A fluid dispensing apparatus is disclosed. Systems include an in-line or linearbladder apparatus configured to expand to collect a charge of fluid, and contract toassist with fluid delivery and dispensing. During a dispense-off period process fluid can

collect in this bladder after the process fluid is pushed through a fine filter (micro filter).A given filtration rate can be less than a dispense rate and thus the system hereincompensates for filter-lag that often accompanies fluid filtering for microfabrication,while providing a generally linear configuration that reduces chances for defect creation.

申请人：Tokyo Electron Limited

地址：Minato-ku, Tokyo JP

国籍：JP

代理机构：DLA Piper LLP US

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